Methods of manufacturing polysilicon
I. Introduction
Polysilicon is an important raw material in the production of chemicals, especially in the field of semiconductor and solar cell manufacturing has a wide range of applications. With the continuous development of science and technology, the manufacturing methods of polysilicon are also being advanced and optimized. In this paper, we will introduce the manufacturing method of polysilicon in detail, including the process, technology, equipment and other aspects of the content.
II. Polysilicon manufacturing methods
1. Triclosilicon method
Triclosilicon method is currently one of the most commonly used methods in the production of polysilicon. The principle of this method is to react silicon metal with hydrogen chloride gas under high temperature and high pressure to generate trichlorohydrosilicon gas, and then trichlorohydrosilicon gas is fractionated and purified to obtain high-purity trichlorohydrosilicon. Next, the high-purity silicon trichlorohydride is thermally decomposed at high temperature to produce polysilicon and hydrogen chloride gas. Finally, the polysilicon is purified and processed to obtain the final product.
The advantages of this method are that the production process is more mature, the product quality is more stable, and high purity polysilicon products can be produced. However, the production process of this method requires the use of a large amount of hydrogen chloride gas, which is more demanding on the environment and equipment, and at the same time, a large amount of waste will be generated during the production process, which needs to be properly disposed of.
2. Silane method
The silane method is a new type of polysilicon manufacturing method. The principle of this method is to react silicon metal with hydrogen to produce silane gas, and then decompose the silane gas to produce polysilicon and hydrogen. Compared with the trichlorohydrosilicon method, the silane method is a simpler production process that does not require the use of large quantities of hydrogen chloride gas, and also produces less waste during the production process.
However, the silane method is more expensive to produce, requires the use of large quantities of hydrogen gas and precious metal catalysts, and requires strict control of safety in the production process.
3. Fluidized bed method
The fluidized bed method is a relatively new method of manufacturing polysilicon. The principle of this method is to react silicon metal powder with hydrogen in a fluidized bed reactor to produce polysilicon and hydrogen. The fluidized bed reactor allows full contact between the silicon metal powder and hydrogen to improve the reaction efficiency. At the same time, the method can also use waste silicon wafers as raw materials, which is environmentally friendly.
However, the production process of the fluidized bed method is not yet fully mature and needs to be further improved and optimized.
Three, polysilicon manufacturing equipment
Polysilicon manufacturing process requires the use of a variety of equipment, including reactors, fractionation towers, thermal decomposition furnaces, purification equipment and so on. The selection and configuration of these equipment needs to be determined according to the specific production process and output. At the same time, due to the polysilicon manufacturing process involves high temperature, high pressure, corrosion and other harsh conditions, so the material and quality of the equipment also need to be strictly controlled.
IV, polysilicon manufacturing process safety issues
polysilicon manufacturing process involves high temperature, high pressure, corrosion and other harsh conditions, while the existence of hydrogen, hydrogen chloride and other harmful gases, so the production process requires strict control of safety issues. Effective measures need to be taken to prevent the occurrence of equipment failure, leakage and other safety accidents to ensure the smooth progress of the production process.
V. Conclusion
Polysilicon is an important raw material in the production of chemicals, and its manufacturing methods include trichlorohydrosilicon method, silane method and fluidized bed method. Different manufacturing methods have different advantages and disadvantages and scope of application, and the appropriate method needs to be selected according to the specific production process and output. At the same time, polysilicon manufacturing process requires the use of a variety of equipment, and need to strictly control the safety issues to ensure the smooth progress of the production process.
